Chemistry of Atomic Layer Deposition

Zusatztext

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Autorenportrait

Seán Thomas Barry, Carleton University, Ottawa, Canada.

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